Semiconductor Glossary, Developed Semi OneSource.

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With over 2000 terms defined and explained, Semiconductor Glossary is the most complete reference in the field of semiconductors on the market today.

Including some 500 new terms defined and remaining terms updated and modified, a 2nd edition book version of this glossary is now available.

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Term (Index) Definition
deep UV, DUV  refers to very short wavelength UV radiation(200 - 300 nm); typically associated with 248 nm wavelength generated by KrF excimer laser.
excimer laser  chemical laser; laser capable of generating very short wavelength (below 200 nm) UV radiation; e.g. KrF (248 nm), ArF (193 nm), F2 (157 nm); commonly used as a source of UV radiation in very-high resolution photolithography.
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Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.