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Term (Index) Definition
crosslinking  process of establishing new bonds in polymeric chains as a result of illumination; foundation of the negative resist technology.
negative resist  resist which is initially soluble in the developer but becomes insoluble after irradiation; cross-linking between polymeric chains take place during irradiation; features lower resolution than positive resist but is more sensitive.
positive resist  resist which is initially insoluble in the developer and becomes soluble as a result of irradiation; chain scission takes place in the resist structure during irradiation; allows higher resolution than negative resist but is less sensitive.
chain scission  process of breaking bonds in polymeric chains as a result of illumination; foundation of a positive resist technology; bond breaking makes positive resist soluble in the developer.
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