Semiconductor Glossary, Developed Semi OneSource.

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With over 2000 terms defined and explained, Semiconductor Glossary is the most complete reference in the field of semiconductors on the market today.


Including some 500 new terms defined and remaining terms updated and modified, a 2nd edition book version of this glossary is now available.

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Term (Index) Definition
crosslinking  process of establishing new bonds in polymeric chains as a result of illumination; foundation of the negative resist technology.
negative resist  resist which is initially soluble in the developer but becomes insoluble after irradiation; cross-linking between polymeric chains take place during irradiation; features lower resolution than positive resist but is more sensitive.
positive resist  resist which is initially insoluble in the developer and becomes soluble as a result of irradiation; chain scission takes place in the resist structure during irradiation; allows higher resolution than negative resist but is less sensitive.
chain scission  process of breaking bonds in polymeric chains as a result of illumination; foundation of a positive resist technology; bond breaking makes positive resist soluble in the developer.
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Jerzy Ruzyllo is a Distinguished Professor Emeritus in the Department of Electrical Engineering at Penn State University.

This book gives a complete account of semiconductor engineering covering semiconductor properties, semiconductor materials, semiconductor devices and their uses, process technology, fabrication processes, and semiconductor materials and process characterization.

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Created and operated by J. Ruzyllo. Copyright J. Ruzyllo 2001-2016. All rights reserved.

Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.