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Term (Index) Definition
computational lithography,  see "lithography, computational"
lithography, computational.  uses numerical simulation techniques such as Resolution Enhancement Technology (RET)and Optical Proximity Correction (OPC) to increase resolution of photolithography; compensates for distortion by modelling light as it passes through the mask.
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Created and operated by J. Ruzyllo. Copyright J. Ruzyllo 2001-2016. All rights reserved.

Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.