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With over 2000 terms defined and explained, Semiconductor Glossary is the most complete reference in the field of semiconductors on the market today.












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Term (Index) Definition
cleanroom  enclosed ultra-clean space in which semiconductor manufacturing takes place; features counts of airborne particles reduced to technically feasible minimum and strictly controlled temperature and humidity of ambient air.

Reference: See more on cleanroom technology
particle  pieces of various materials (dust, ultra-small chips of silicon or silica, skin flakes, colonies of bacteria, etc.) present in the process environment; even ultra-small particles(<0.1 micrometer) on the Si surface may cause catastrophic damage; no effort is spared to prevent particle contamination (clean-room technology); most commonly particles are removed by an APM clean.
Term (Index) Definition
ballroom cleanroom  cleanroom design in which process and service areas are located at the same level; relatively straightforward and inexpensive (as compared to other cleanroom designs) approach which, however, offers very little flexibility.
cleanroom  enclosed ultra-clean space in which semiconductor manufacturing takes place; features counts of airborne particles reduced to technically feasible minimum and strictly controlled temperature and humidity of ambient air.

Reference: See more on cleanroom technology
Term (Index) Definition
class cleanroom  defined in terms of particles 0.5 micrometer and larger per cubic foot of air; e.g. Class 10 = maximum 10 particles 0.5 micron and larger per ft3.
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Created and operated by J. Ruzyllo. Copyright J. Ruzyllo 2001-2016. All rights reserved.

Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.