Semiconductor Glossary, Developed Semi OneSource.
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Term (Index) Definition
chemisorption  adsorption of species (adsorbates) to solid surfaces by the formation of chemical bond between the adsorbate and the surface.
adsorption  binding between foreign molecules and the solid occurring only on the solid surface; specie is attached to the solid surface by weak physical force (van der Waals force).
physisorption  the weakest form of adsorption resulting from purely physical attraction (van der Waals force) between the adsorbate and the surface; no chemical bond between the adsorbate and the surface is formed.
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Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.