Semiconductor Glossary, Developed Semi OneSource.

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With over 2000 terms defined and explained, Semiconductor Glossary is the most complete reference in the field of semiconductors on the market today.


Including some 500 new terms defined and remaining terms updated and modified, a 2nd edition book version of this glossary is now available.

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Term (Index) Definition
chemical etching  process of etching through chemical reaction between chemically reactive etching species and etched material; isotropic and selective.
isotropic etch  etch in which rate of etching reaction is the same in any direction; non-directional.
selective etching  etching processes in which one material is etched rapidly while the other is etched very slowly or not etched at all; Example - HF:water solution is etching SiO2 very rapidly while not etching silicon.
physical etching  sputter etching; process of etching through physical interactions (momentum transfer)between accelerated chemically inert ions (e.g. Ar+)and etched solid; anisotropic, non-selective.
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Jerzy Ruzyllo is a Distinguished Professor Emeritus in the Department of Electrical Engineering at Penn State University.

This book gives a complete account of semiconductor engineering covering semiconductor properties, semiconductor materials, semiconductor devices and their uses, process technology, fabrication processes, and semiconductor materials and process characterization.

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Created and operated by J. Ruzyllo. Copyright J. Ruzyllo 2001-2016. All rights reserved.

Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.