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Term (Index) Definition
channel stop  p+ implanted layer underneath oxide pad in LOCOS isolation scheme in CMOS devices; put in place to prevent formation of an inversion layer which would create a conductive channel between PMOS and NMOS parts of the CMOS cell.
latch up, latchup, latch-up  adverse effect occurring in CMOS devices; condition under which significant current flows through Si substrate between NMOS and PMOS parts of CMOS structure and degrades its performance; it occurs when under certain bias conditions two parasitic bipolar transistors resulting from CMOS configuration "latch" and provide high conductivity path between NMOS and PMOS parts of the device; various CMOS designs were conceived to prevent latch-up; implementation of CMOS technology on SOI substrates is an ultimate solution to the CMOS latch-up.
LOCOS  Local Oxidation of Silicon; isolation scheme commonly used in MOS/CMOS silicon technology; thick (in the range of 500 nm) pad of thermally grown SiO2 separates adjacent devices (e.g. PMOS and NMOS transistor in CMOS structure); local oxidation is accomplished by using silicon nitride, Si3N4, to prevent oxidation of Si in selected areas, hence, "local" oxidation; prior to SiO2 pad formation silicon in between Si3N4 covered regions is implanted to form "channel stop"; Si3N4 mask is etched off following thermal oxidation and MOSFETs are ten formed in the open spaces.
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Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.