Semiconductor Glossary, Developed Semi OneSource.
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With over 2000 terms defined and explained, Semiconductor Glossary is the most complete reference in the field of semiconductors on the market today.












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Term (Index) Definition
chain scission  process of breaking bonds in polymeric chains as a result of illumination; foundation of a positive resist technology; bond breaking makes positive resist soluble in the developer.
positive resist  resist which is initially insoluble in the developer and becomes soluble as a result of irradiation; chain scission takes place in the resist structure during irradiation; allows higher resolution than negative resist but is less sensitive.
resist  material sensitive to irradiation i.e. changes its chemical properties when irradiated; in the form of thin film used as a pattern transfer layer in lithographic processes in semiconductor manufacturing.
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