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Term (Index) Definition
breakdown, hard  irreversible, catastrophic breakdown of an oxide in MOS structures.
oxide breakdown  irriversible change in physical properties of an insulating oxide as a result of very high electric field in the oxide; as a result of "breakdown" oxide no longer displays insulating properties.

Reference: See Semiconductor Note #20 for more information
breakdown, soft  leakage current in MOS structure exceeds predetermined threshold value without casing permanent damage to the oxide; can be reversed by reducing field in the oxide.
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