Semiconductor Glossary, Developed Semi OneSource.

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With over 2000 terms defined and explained, Semiconductor Glossary is the most complete reference in the field of semiconductors on the market today.


Including some 500 new terms defined and remaining terms updated and modified, a 2nd edition book version of this glossary is now available.

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Term (Index) Definition
boat  (i) a device designed to hold semiconductor wafer during thermal processes; made of high purity temperature resistant materials such as fused silica, quartz, polycrystalline Si, or SiC. (ii) device designed to contain source material during thermal evaporation acting at the same time as a heater; made of temperature resistant highly conductive material through which current is passed.
evaporation  common technique used to deposit thin film materials; material to be deposited is heated in vacuum, 10-6 Torr - 10-7 Torr range, until it melts and starts evaporating; vapor of material is condensing on the cooler substrate exposed to the vapor; common technique in thin film metal deposition; not suitable for high melting point materials; one of the PVD (Physical Vapor Deposition) methods of thin film formation.
thermal oxidation, thermal oxide  growth of native oxide of the solid through oxidation of solid's surface at elevated temperature; results from chemical reaction of host atoms with oxygen containing ambient; thermal oxidation of silicon results in a very high quality silicon dioxide, SiO2, formed on the silicon surface; most other semiconductors do not form device quality thermal oxide, hence, term "thermal oxidation" is almost synonymous with "thermal oxidation of silicon".

Reference: Thermal oxidation of silicon.
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Jerzy Ruzyllo is a Distinguished Professor Emeritus in the Department of Electrical Engineering at Penn State University.

This book gives a complete account of semiconductor engineering covering semiconductor properties, semiconductor materials, semiconductor devices and their uses, process technology, fabrication processes, and semiconductor materials and process characterization.

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Created and operated by J. Ruzyllo. Copyright J. Ruzyllo 2001-2016. All rights reserved.

Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.