Semiconductor Glossary, Developed Semi OneSource.

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With over 2000 terms defined and explained, Semiconductor Glossary is the most complete reference in the field of semiconductors on the market today.


Including some 500 new terms defined and remaining terms updated and modified, a 2nd edition book version of this glossary is now available.

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Term (Index) Definition
autodoping  dopant atoms evaporating from semiconductor surface region during high temperature treatments can be reintroduced into semiconductor causing undesired variations in dopant concentration at the surface; highly undesired effect; of particular concnern in high-temperature epitaxial deposition processes.
epitaxy  process by which thin layer of single-crystal material is deposited on single-crystal substrate; epitaxial growth occurs in such way that the crystallographic structure of the substrate is reproduced in the growing material; also crystalline defects of the substrate are reproduced in the growing material.
outdiffusion  undesired effect occurring at high temperature: dopant atoms diffuse from the material featuring high doping level to the material featuring low doping level; common in high temperature epitaxial deposition where it prevents sharp change in dopant concentration between epi layer and the substrate; temperature of epitaxial deposition must be reduce to control outdiffusion.
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Jerzy Ruzyllo is a Distinguished Professor Emeritus in the Department of Electrical Engineering at Penn State University.

This book gives a complete account of semiconductor engineering covering semiconductor properties, semiconductor materials, semiconductor devices and their uses, process technology, fabrication processes, and semiconductor materials and process characterization.

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Created and operated by J. Ruzyllo. Copyright J. Ruzyllo 2001-2016. All rights reserved.

Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.