Semiconductor Glossary, Developed Semi OneSource.

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With over 2000 terms defined and explained, Semiconductor Glossary is the most complete reference in the field of semiconductors on the market today.


Including some 500 new terms defined and remaining terms updated and modified, a 2nd edition book version of this glossary is now available.

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Term (Index) Definition
arsenic, As  n-type dopant (donor) in silicon; features diffusion coefficient comparable to antimony and about order of magnitude lower that diffusion coefficient of phosphorous; donor of choice in very small geometry device manufacturing.
donor  element introduced to semiconductor to generate free electron (by "donating" electron to semiconductor); must have one more valance electron than semiconductor; common donors in Si: P, As, Sb and in GaAs: S, Se, Sn, Si, and C.
dopant  element introduced into semiconductor to establish either p- type (acceptors) or n- type (donors) conductivity; common dopants in silicon: p-type, boron, B; n-type phosphorous, P, arsenic, As ,antimony, Sb.
antimony, Sb  n-type dopant (donor) in silicon; used mainly to dope epitaxial layers; diffusion coefficient comparable to arsenic and about order of magnitude lower that diffusion coefficient of phosphorous.
arsine, AsH3  gaseous source of As for n-type doping of silicon by diffusion or ion implantation; highly toxic and flammable gas; must be handled with utmost care.
phosphorus, P  element from the 5th group of periodic table; common n-type dopant (donor) in silicon; about 10 times faster than As and Sb (other n-type dopants of Si) diffusant in Si.
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Jerzy Ruzyllo is a Distinguished Professor Emeritus in the Department of Electrical Engineering at Penn State University.

This book gives a complete account of semiconductor engineering covering semiconductor properties, semiconductor materials, semiconductor devices and their uses, process technology, fabrication processes, and semiconductor materials and process characterization.

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Created and operated by J. Ruzyllo. Copyright J. Ruzyllo 2001-2016. All rights reserved.

Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.