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Term
(Index)
Definition
anodization
anodic oxidation; process of oxidation in which growth of an oxide on the surface of the biased conductive solid (e.g. semiconductor wafer) immersed in the liquid electrolyte or gas discharge is stimulated by the flow of electric current.
Term
(Index)
Definition
plasma anodization
oxidation of the surface of conductive solid in an oxygen plasma.
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