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Term (Index) Definition
afterglow plasma  terms refers to the configuration of the plasma tool; same as remote plasma and downstream plasma.
remote plasma, downstream plasma  terms describing plasma processing mode in which wafer is located away from plasma, and hence, is not directly exposed to plasma; desired reactions (e.g. etching) are implemented by extracting ionized species from plasma and directing them toward the wafer; remote plasma process results in less surface damage than standard process as plasma generated ions are energetically relaxed arriving at the surface of the wafer.
downstream plasma  remote plasma
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Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.