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Term (Index) Definition
adhesion  ability of materials to stick (adhere) to each other.
HMDS  Hexamethyldisilizane; adhesion promoter; material improving adhesion of photoresist to the surface; deposited on wafer surface prior to deposition of resist.
Term (Index) Definition
adhesion promoter  material used to improve adhesion of materials; typically understood as a material improving adhesion of photoresist to the wafer surface in the lithographic processes.
HMDS  Hexamethyldisilizane; adhesion promoter; material improving adhesion of photoresist to the surface; deposited on wafer surface prior to deposition of resist.
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