Semiconductor Glossary, Developed Semi OneSource.
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Term (Index) Definition
XPS  X-Ray Photoelectron Spectroscopy; surface analysis method used to determine chemical composition of solid surfaces; allows determination of bonding energy; analysis is based on the determination of energy of electrons emitted from the solid as a result of irradiation with monochromatic X-rays; very useful in detecting on Si surface Si-suboxides, as well as O, F, C; an ESCA method (along with UPS).
ESCA  Electron Spectroscopy for Chemical Analysis; surface characterization method based on the analysis of photoelectrons ejected from the surface region as a results of either UV irradiation (UPS - UV Photoelectron Spectroscopy), or X-ray irradiation(XPS - X-ray Photoelectron Spectroscopy).
UPS  Ultraviolet Electron Spectroscopy; method of material characterization; based on the emission of photoelectrons from the solid stimulated by UV irradiation; an ESCA method (along with XPS).
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