Semiconductor Glossary, Developed Semi OneSource.
Google
 


Check out the new SemiconductorGlossary.com weBLOG!



With over 2000 terms defined and explained, Semiconductor Glossary is the most complete reference in the field of semiconductors on the market today.












Including some 500 new terms defined and remaining terms updated and modified, a 2nd edition book version of this glossary is now available.


Search For Term

Term (Index) Definition
TXRF  Total Reflection X-Ray Fluorescence (spectroscopy); very effective method for detection of metallic contaminants on the wafer surface; detection of the energy of photons emitted from atoms on the surface as a result of X-ray irradiation at the angle assuring total external reflectance.
metallic contaminant  atoms of metals deposited on the Si surface during device processing as a reult of process malfunction; common metallic contaminants: Fe, Al, Cu, Ca, Na; originate from process chemicals, ambient, and tools; major reliability problem; should not be allowed on Si surface in concentrations above 109 cm-2; designated cleans are applied to remove metallic contaminants from the surface.
X-ray Fluoroescence, XRF  method used to study chemical composition of solids; does not distinguish between surface and the bulk of the solid, and hence, is not very useful in characterization of semiconductor wafers .
Term (Index) Definition
Total Reflection X-Ray Fluorescence spectroscopy, TXRF  a method very effective in detecting metallic contaminants on the wafer surface; detection of the energy of photons emitted from atoms on the surface as a result of X-ray irradiation at the angle assuring total external reflectance.
Hit Count=

Back To Top! 

Back To Home!







Hit Count=
Created and operated by J. Ruzyllo. Copyright J. Ruzyllo 2001-2016. All rights reserved.

Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.