Semiconductor Glossary, Developed Semi OneSource.
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With over 2000 terms defined and explained, Semiconductor Glossary is the most complete reference in the field of semiconductors on the market today.


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Including some 500 new terms defined and remaining terms updated and modified, a 2nd edition book version of this glossary is now available.


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Term (Index) Definition
TXRF  Total Reflection X-Ray Fluorescence (spectroscopy); very effective method for detection of metallic contaminants on the wafer surface; detection of the energy of photons emitted from atoms on the surface as a result of X-ray irradiation at the angle assuring total external reflectance.
metallic contaminant  atoms of metals deposited on the Si surface during device processing as a reult of process malfunction; common metallic contaminants: Fe, Al, Cu, Ca, Na; originate from process chemicals, ambient, and tools; major reliability problem; should not be allowed on Si surface in concentrations above 109 cm-2; designated cleans are applied to remove metallic contaminants from the surface.
X-ray Fluoroescence, XRF  method used to study chemical composition of solids; does not distinguish between surface and the bulk of the solid, and hence, is not very useful in characterization of semiconductor wafers .
Term (Index) Definition
Total Reflection X-Ray Fluorescence spectroscopy, TXRF  a method very effective in detecting metallic contaminants on the wafer surface; detection of the energy of photons emitted from atoms on the surface as a result of X-ray irradiation at the angle assuring total external reflectance.
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Jerzy Ruzyllo is a Distinguished Professor Emeritus in the Department of Electrical Engineering at Penn State University.



This book gives a complete account of semiconductor engineering covering semiconductor properties, semiconductor materials, semiconductor devices and their uses, process technology, fabrication processes, and semiconductor materials and process characterization.


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Created and operated by J. Ruzyllo. Copyright J. Ruzyllo 2001-2016. All rights reserved.

Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.