Semiconductor Glossary, Developed Semi OneSource.
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With over 2000 terms defined and explained, Semiconductor Glossary is the most complete reference in the field of semiconductors on the market today.












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Term (Index) Definition
TOF-SIMS, TOFSIMS  Time-of-Flight SIMS; a type of SIMS in which ultra-low current incident ion beam is used; virtually non-destructive; information regarding chemical composition of very top surface of solids can be obtained; useful in detection of organic compounds adsorbed to the surface.
SIMS  Secondary Ion Mass Spectroscopy; material characterization method; atoms sputtered off the surface are identified by determination of their mass (mass spectroscopy); conventional dynamic SIMS features high sputtering rate while static SIMS uses extremely low sputtering rate allowing better sensitivity to the characteristics of the very surface; allows depth profiling.
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