Semiconductor Glossary, Developed Semi OneSource.
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Term (Index) Definition
TD-GC-MS  Thermal Desorption Gas Chromatograph Mass Spectroscopy; variation of GS-MC method; used to detect organic contaminants on semiconductor surface.
organic contaminant  in semiconductor processing mainly hydrocarbons from resist/etching processes, ambient air, storage environment, shipping boxes, etc.; if not controlled may cause reliability problems in MOS devices as well as have an adverse effect on the characteristics of metal-semiconductor contacts and epitaxial layers; removal accomplished using strongly oxidizing ambient both wet and dry.
GC - MS, gas chromatography  Gas Chromatography Mass Spectroscopy; in solid-state technology used to study species adsorbed on solid surfaces (desorption + analysis by MS); in semiconductor practice technique used to detect organic contaminants on silicon surface.
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Created and operated by J. Ruzyllo. Copyright J. Ruzyllo 2001-2016. All rights reserved.

Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.