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Term (Index) Definition
SWI  Single-Wafer Processor/Process; as the wafer size in high-end IC manufacturing increases, a trend toward single-wafer processing (as opposed to batch processing) intensifies.
batch process  process in which several wafers are processed at the same time; opposite to single wafer process; e.g. thermal oxidation in the furnace (either horizontal or vertical) is a prime example of the batch process.
single-wafer process  only one wafer is processed at the time; opposite to batch process in which several wafers are processed simultaneously; tools are designed specifically for a single-wafer processing; becomes more common as with the gradual increase of wafer diameter and circuit complexity, each and every wafer must be treated individually.
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