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Term (Index) Definition
SWAMI  variation of LOCOS process in which "bird beak" is minimized.
bird beak  sharp, bird beak-like shaped structure at the Si surface at the edge of LOCOS oxides; undesired as it may cause reliability problem in CMOS devices.
LOCOS  Local Oxidation of Silicon; isolation scheme commonly used in MOS/CMOS silicon technology; thick (in the range of 500 nm) pad of thermally grown SiO2 separates adjacent devices (e.g. PMOS and NMOS transistor in CMOS structure); local oxidation is accomplished by using silicon nitride, Si3N4, to prevent oxidation of Si in selected areas, hence, "local" oxidation; prior to SiO2 pad formation silicon in between Si3N4 covered regions is implanted to form "channel stop"; Si3N4 mask is etched off following thermal oxidation and MOSFETs are ten formed in the open spaces.
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