Semiconductor Glossary, Developed Semi OneSource.
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Term (Index) Definition
SOD  Spin On Dielectric; dielectric in the form of viscous liquid is deposited by spin-on process and then solidified through thermal curing.
spin-on deposition, spin coating  process used to coat the wafer with material which is originally in the liquid form; liquid is dispensed onto the wafer surface in predetermined amount and the wafer is rapidly rotated (up to 6000 rpm; during spinning liquid is uniformly distributed on the surface by centrifugal forces; material is then solidified by low temperature (typically <200 oC) bake; in semiconductor processing commonly used to apply photoresist.
spin-on glass, SOG  thin layer of SiO2 (often doped) deposited on the wafer surface by spin-on process.
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