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Term (Index) Definition
SEG  Selective Epitaxial Growth
epitaxy  process by which thin layer of single-crystal material is deposited on single-crystal substrate; epitaxial growth occurs in such way that the crystallographic structure of the substrate is reproduced in the growing material; also crystalline defects of the substrate are reproduced in the growing material.
selective epitaxy  epitaxial growth on the substrate which is only partially a single-crystal material; for instance in the case of single crystal Si partially covered with oxide, Si will grow epitaxially only (selectively) on the surface of a single-crystal Si.
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