Semiconductor Glossary, Developed Semi OneSource.
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With over 2000 terms defined and explained, Semiconductor Glossary is the most complete reference in the field of semiconductors on the market today.












Including some 500 new terms defined and remaining terms updated and modified, a 2nd edition book version of this glossary is now available.


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Term (Index) Definition
Roots pump  high efficiency roughing pump; used in oil vapor-free vacuum systems.
rough, roughing, pump  vacuum pump designed to reduced pressure from atmospheric to militorr range.
dry pump  entirely dry (oil vapor-free) roughing (down to the vacuum of about 10-3 torr)pump; increasingly common in advanced semiconductor process equipment because it is oil-free; dry screw pump: screw-shaped rotor drives gas molecules out.
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Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.