Semiconductor Glossary, Developed Semi OneSource.

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With over 2000 terms defined and explained, Semiconductor Glossary is the most complete reference in the field of semiconductors on the market today.

Including some 500 new terms defined and remaining terms updated and modified, a 2nd edition book version of this glossary is now available.

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Term (Index) Definition
Radio Frequency, RF, plasma  plasma generated at 13.6 MHz.
RF  Radio Frequency; common frequency in RF range used in semiconductor process equipment (plasma generators)is 13.6 MHz.
plasma  ionized gas, specifically a self-contained part of the electrical discharge in gases featuring equal concentration of ions and electrons; plasma contains electrically active species, but as a whole is electrically neutral; ions can be extracted from plasma to play variety of important functions in semiconductor processing.
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Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.