Semiconductor Glossary, Developed Semi OneSource.
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Term (Index) Definition
RTA  Rapid Thermal Annealing; annealing process carried out for a very short time; typically performed for the purpose of improving properties of materials and/or device structures.
anneal  heat treatment to which wafer is subjected in order to modify properties of materials/structures processed on its surface or in the bulk.
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Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.