Semiconductor Glossary, Developed Semi OneSource.

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With over 2000 terms defined and explained, Semiconductor Glossary is the most complete reference in the field of semiconductors on the market today.


Including some 500 new terms defined and remaining terms updated and modified, a 2nd edition book version of this glossary is now available.

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Term (Index) Definition
RMS  Root Mean Square; often use as a measure of surface roughness determined by Atomic Force Microscopy.
AFM  Atomic Force Microscopy; method capable of surface visualization with near-atomic resolution; measurement of roughness of solid surfaces based on electrostatic interactions between surface and measuring tip; tip can be set above the surface, on the surface, or can tap the surface oscillating at high frequency (tapping mode).
surface roughness  disruption of the planarity of the semiconductor surface; measured as a difference between highest and deepest surface features; can be as low as about 0.06 nm for high quality Si wafers with epitaxial layers.
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Jerzy Ruzyllo is a Distinguished Professor Emeritus in the Department of Electrical Engineering at Penn State University.

This book gives a complete account of semiconductor engineering covering semiconductor properties, semiconductor materials, semiconductor devices and their uses, process technology, fabrication processes, and semiconductor materials and process characterization.

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Created and operated by J. Ruzyllo. Copyright J. Ruzyllo 2001-2016. All rights reserved.

Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.