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Term (Index) Definition
MOSFET scaling,  reduction of MOSFET's geometry for the purpose of improving its performance; the goal is to reduce channel (gate) length and in the process maintain device fully operational; scalng rules must be followed to avoid undesired short-channel effects.
scaling rules  design rules which must be followed while scaling down geometry of integrated devices and interconnect lines; arbitrary reduction of key geometries, e.g. channel length in MOSFETs, may results in dysfunctional devices, e.g. short-channel effects in MOSFET.
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