Semiconductor Glossary, Developed Semi OneSource.
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Term (Index) Definition
MOEMS  Micro-Opto-Electro-Mechanical Systems; basically MEMS devices than can control, or can be controlled by, light; based on optical phenomena such as reflection, diffraction, or refraction.
MEMS  Micro Electro Mechanical Systems micromachined in silicon; typically integrated with electronic microcircuits; generally fall into two categories of microsensors and microactuators; depending on application operation based on electrostriction, or electromagnetic, thermoelastic, piezoelectric, or piezoresistive effect.
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Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.