Semiconductor Glossary, Developed Semi OneSource.
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Term (Index) Definition
IR  infrared (radiation); wavelength from 0.7 micrometer to 15 micrometer; invisible; often used for heating purposes.
Fourier - Transform Infrared Spectroscopy, FTIR  material characterization method used to investigate composition of materials on the basis of the analysis of spectral absorption bands; uses Fourier transform spectrometer; samples must be transparent to infrared radiation.
lamp heating  use of high-power IR lamps for the purpose of increasing wafer temperature; in contrats to other methods of thermal processing (see furnace)allows very brief wafer exposure to very high temparature (typically not exceeding 1100 oC); low thermal budget process.
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