Semiconductor Glossary, Developed Semi OneSource.
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Term (Index) Definition
IMD  Inter-Metal Dielectric; same as Inter-Layer Dielectric; an insulator featuring as low dielectric constant k as possible; used to electrically insulate interconnect lines in an integrated circuit.
ILD, Inter-Layer Dielectric  Inter Level Dielectric; same as Inter Layer Dielectric and IMD, dielectric material used to electrically separate closely spaced interconnect lines arranged in several levels (multilevel metallization) in an advanced integrated circuit; ILD must feature low dielectric constant k (as close to 1 as possible) to minimize capacitive coupling ("cross talk") between adjacent metal lines.

Reference: see SemiOneSource,Notes for additional information
low-k dielectric  dielectric material featuring dielectric constant k lower than 3.9 which is k of SiO2; used to insulate adjacent metal lines (interlayer dielectric, ILD) in advanced integrated circuits; low k reduces undesired capacitive coupling, and hence "cross talk", between lines.

Reference: SemiOneSource,Notes
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