Semiconductor Glossary, Developed Semi OneSource.
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Term (Index) Definition
HSQ  hydrogensilsesquioxanes; low-k dielectrics used as interlayer dielectric in advanced interconnect schemes.
low-k dielectric  dielectric material featuring dielectric constant k lower than 3.9 which is k of SiO2; used to insulate adjacent metal lines (interlayer dielectric, ILD) in advanced integrated circuits; low k reduces undesired capacitive coupling, and hence "cross talk", between lines.

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