Semiconductor Glossary, Developed Semi OneSource.

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With over 2000 terms defined and explained, Semiconductor Glossary is the most complete reference in the field of semiconductors on the market today.


Including some 500 new terms defined and remaining terms updated and modified, a 2nd edition book version of this glossary is now available.

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Term (Index) Definition
ESCA  Electron Spectroscopy for Chemical Analysis; surface characterization method based on the analysis of photoelectrons ejected from the surface region as a results of either UV irradiation (UPS - UV Photoelectron Spectroscopy), or X-ray irradiation(XPS - X-ray Photoelectron Spectroscopy).
XPS  X-Ray Photoelectron Spectroscopy; surface analysis method used to determine chemical composition of solid surfaces; allows determination of bonding energy; analysis is based on the determination of energy of electrons emitted from the solid as a result of irradiation with monochromatic X-rays; very useful in detecting on Si surface Si-suboxides, as well as O, F, C; an ESCA method (along with UPS).
UPS  Ultraviolet Electron Spectroscopy; method of material characterization; based on the emission of photoelectrons from the solid stimulated by UV irradiation; an ESCA method (along with XPS).
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Jerzy Ruzyllo is a Distinguished Professor Emeritus in the Department of Electrical Engineering at Penn State University.

This book gives a complete account of semiconductor engineering covering semiconductor properties, semiconductor materials, semiconductor devices and their uses, process technology, fabrication processes, and semiconductor materials and process characterization.

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Created and operated by J. Ruzyllo. Copyright J. Ruzyllo 2001-2016. All rights reserved.

Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.