Semiconductor Glossary, Developed Semi OneSource.

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With over 2000 terms defined and explained, Semiconductor Glossary is the most complete reference in the field of semiconductors on the market today.

Including some 500 new terms defined and remaining terms updated and modified, a 2nd edition book version of this glossary is now available.

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Term (Index) Definition
ECR  Electron Cyclotron Resonance; used to generate high density plasma; efficiency of ionization of gas, and hence density of plasma, is increased by magnetic field which is forcing electrons into cyclotron resonance.
Term (Index) Definition
ECR plasma  high density plasma generated using Electron Cyclotron Resonance; used primarily in etching applications; ECR plasma allows efficient etching with limited surface damage.
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Created and operated by J. Ruzyllo. Copyright İ J. Ruzyllo 2001-2016. All rights reserved.

Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.