Semiconductor Glossary, Developed Semi OneSource.

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With over 2000 terms defined and explained, Semiconductor Glossary is the most complete reference in the field of semiconductors on the market today.

Including some 500 new terms defined and remaining terms updated and modified, a 2nd edition book version of this glossary is now available.

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Term (Index) Definition
Caro clean  same as SPM clean
SPM  cleaning solution; involves H2SO4:H2O2 mixture typically in 1: 4; mixing of components increases temperature of solution to over 100 oC,strongly oxidizing clean is used to remove organic materials, including remaining photoresist, from the wafer surface; typically applied first in the cleaning sequence; also know as "piranha" clean and "caro" clean.
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Created and operated by J. Ruzyllo. Copyright J. Ruzyllo 2001-2016. All rights reserved.

Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.