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Term (Index) Definition
CEL  Contrast Enhancement Layer; increases resolution of the resist.
Term (Index) Definition
Contrast Enhanced Layer, CEL  layer in the photoresist stack added to increase resolution of the pattern transfer process.
enhancement techniques  term typically refers to techniques employed to extend use of photolithography into sub-100 nm regime; e.g., phase-shift masks, immersion photolithography, new photoresist formulations, etc.
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