Semiconductor Glossary, Developed Semi OneSource.
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Term (Index) Definition
CAIBE  Chemically Assisted Ion Beam Etching
chemical etching  process of etching through chemical reaction between chemically reactive etching species and etched material; isotropic and selective.
physical etching  sputter etching; process of etching through physical interactions (momentum transfer)between accelerated chemically inert ions (e.g. Ar+)and etched solid; anisotropic, non-selective.
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Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.