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Semiconductor Glossary book, click here to see new prices!
With over 2000 terms defined and explained, Semiconductor Glossary is the most complete reference in the field of semiconductors on the market today.
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Including some 500 new terms defined and remaining terms updated and modified, a 2nd edition book version of this glossary is now available.
Auger Electron Spectroscopy, AES
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surface characterization and depth profiling method based on the determination of the energy of Auger electrons ejected from the solid surface bombarded with high energy ions; only elements with atomic number > 2 can be detected.
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surface analysis
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process aimed at the determination of chemical composition and/or structure of solid surfaces.
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Jerzy Ruzyllo is a Distinguished Professor Emeritus in the Department of Electrical Engineering at Penn State University.
This book gives a complete account of semiconductor engineering covering semiconductor properties, semiconductor materials, semiconductor devices and their uses, process technology, fabrication processes, and semiconductor materials and process characterization.
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