Semiconductor OneSource: Semiconductor Glossary -- Search For : afm

Term (Index)	Definition
AFM	Atomic Force Microscopy; method capable of surface visualization with near-atomic resolution; measurement of roughness of solid surfaces based on electrostatic interactions between surface and measuring tip; tip can be set above the surface, on the surface, or can tap the surface oscillating at high frequency (tapping mode).
RMS	Root Mean Square; often use as a measure of surface roughness determined by Atomic Force Microscopy.
roughness	lack of planarity of solid surface at the atomic level; three-dimensional surface morphology; in high quality Si wafers better than 0.1 nm.