Semiconductor Glossary, Developed Semi OneSource.
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With over 2000 terms defined and explained, Semiconductor Glossary is the most complete reference in the field of semiconductors on the market today.












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Term (Index) Definition
AFM  Atomic Force Microscopy; method capable of surface visualization with near-atomic resolution; measurement of roughness of solid surfaces based on electrostatic interactions between surface and measuring tip; tip can be set above the surface, on the surface, or can tap the surface oscillating at high frequency (tapping mode).
RMS  Root Mean Square; often use as a measure of surface roughness determined by Atomic Force Microscopy.
roughness  lack of planarity of solid surface at the atomic level; three-dimensional surface morphology; in high quality Si wafers better than 0.1 nm.
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