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2.5.2. Vacuum equipment

Quality of semiconductor manufacturing processes is improved in several aspects when they are carried out in gases at the pressure reduced below atmospheric, or in the vacuum. As a result, majority of gas-phase processes in semiconductor fabrication use equipment allowing reduction of ambient pressure.

In semiconductor fabrication the range of reduced pressures used varies from high sub-atmospheric (i.e. < 760 torr) to vacuum as low as 10-9 torr (see "Pressure units") - in semiconductor technology units of pressure commonly used are Torr (torr) and Pascal (Pa). The key component of any vacuum system is a pump used to evacuate air and other gases from the process chamber (vacuum pumps).

Suggested search words: vacuum pumps, dry pump, roughening pump, turbomolecular pump, pressure meters, vacuum gauges, leak detector, vacuum valves


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