|
|
|
2.2.1. Planar devices
The term "planar" is used here in reference to semiconductor devices which are essentially two-dimensional, i.e. (i) their depth (thickness) is negligible as compared to their width and length and (ii) "active" surfaces in these devices are parallel to the surface of the substrate. Planar semiconductor devices are by far the most common. Fabrication of planar devices uses the same methods as fabrication of non-planar devices, but the processing of the horizontal surfaces is emphasized in the former case.
This section is still under construction
References
|
| Created and operated by J. Ruzyllo. Copyright © J. Ruzyllo 2007. All rights reserved.
|
|
|
