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Saturday, February 4, 2012

#189 Global nature of semiconductors

Semiconductor science and engineering has become a truly global affair. It was not this way some 40 years ago and earlier when dominance of the United States in semiconductor R&D as well as in semicoinductor industrial activities was firmly established. Today, over 80% of the worldwide wafer processing capabilities are installed in Asia with Taiwan and Japan leading the field. China is rapidly catching up and in terms of single companies Samsung Electronics is projected to take over Intel as a largest semiconductor manufacturer in the world.

 

Well, there is no doubt that for those involved with semiconductors for a long time it is quite a different landscape. All we need to do is to be fully aware of the global nature of semiconductor science and engineering and take advantage of challenges and opportunities it brings.

Posted by Jerzy Ruzyllo at 07:28 PM | Semiconductors | Comments (0) | Link


Saturday, January 28, 2012

#188 193 nm saga continues

Almost exactly two years ago (on Feb. 2, 2008 to be exact) I posted a blog praising photolithography community for extending applicability of 193 nm exposure tools well beyond expectations ( for your convenience I copy this blog below).

 
Well, four years later, i.e. with current 32 nm technology node, I am glad to note that the193 nm lithography is still going strong. The 193 nm saga continues due to the growing arsenal of innovative exposure enhancement techniques industry is rolling out. In addition to phase shift masks and immersion lithography mentioned earlier (see below) it is now computational lithography and multiple printing that are now assisting 193 nm in carrying the load of cutting edge photolithography.
 
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# 14 Resilient 193 nm (Feb. 2, 2008)
 
This is a tribute to the photolithography community which to a significant degree is responsible for the Moore’s law to be alive and well.
 
What’s going on in photolithography these days is a prime example of the ingenuity of scientists and engineers associated with semiconductor industry. Since the very beginning of IC technology, every few technology generations the wavelengths of the resist exposing radiation had do be reduced to cope with a resolution killing diffraction effects. 
 
It was not long ago that 436 nm (g-line) was serving the needs of technology nodes above 250 nm. Then i-line (365 nm) lithography followed at 250 nm. As there was not much more that could be squeezed out of mercury vapor/Xe based UV sources, the industry smoothly switched to excimer laser sources first with 248 nm KrF laser for 180 nm, then 193 nm ArF laser for 150 nm technology node. Then, …well, it turned out that this time around we ran for good out of options regarding intense enough UV sources below 193 nm wavelength range.
 
What happened next is quite amazing. In order to avoid the need to move (or at least to delay it) to the prohibitively expensive extreme UV (EUV) sources, or for all sort of reasons “inconvenient” non-optical lithographies, the photolithography researchers and engineers rolled up their sleeves and came up with a streak of exposure enhancing techniques such as phase-shift masks, immersion exposure tools and several others. All of them combined keep on extending the life of 193 nm lithography beyond any expectations. Could we ever expected that the 193 nm-based exposure tools would take us on the ride across seven technology generations all the way from 150 nm to 22 nm technology node? (Am I too optimistic regarding future 22 nm node?)
 
And that’s what I call “working around the barriers”.
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Posted by Jerzy Ruzyllo at 09:06 AM | Semiconductors | Comments (0) | Link


Wednesday, January 18, 2012

#187 Digging deep into the Periodic Table of Elements

The pool of elements semiconductor industry draws from to engineer functional devices is increasing as applications of semiconductor devices and their complexity grow.  There were times, late 60's and early 70's to be exact, when the load was carried out almost entirely by just five elements: Si (substrate), O (component of SiO2) and Al (contacts) with B and P acting as p-type and n-type dopants, respectively (As and Sb n-type dopants were not as common as P at that time). In terms of elements that was all that was needed to be included in the structure of almost all mass produced commercial semiconductor devices in those early years.

How different it is now! Complex Si based integrated circuits and a broad range of compound semiconductors being used to fabricate commercial devices expanded elements base of semiconductor industry immensely. A quick review of the Periodic Table of Elements indicates that as many  as one third of all the elements occurring in nature are needed to engineer electronic and protonic devices these days. Let's hope that nature provided us with supply of elements sufficient  to support growth of semiconductor technology for many years to come.
 

Posted by Jerzy Ruzyllo at 08:24 PM | Semiconductors | Comments (0) | Link


Sunday, January 8, 2012

#186 Energy harvesting

Although I am not directly involved in the development of energy harvesting devices and systems, still I am very upbeat about anything that is being done in this area. In the light of continuously increasing cost of energy, and that fact that it comes mostly from non-renewable sources, any attempt to scavenge energy which would otherwise be wasted should be applauded.

 

To me, the most fascinating part of the energy harvesting is not a large scale conversion of solar or wind energy into electricity, but the prospect of recovery of micro-energy wasted during routine activities such as walking or motion in general, for instance. Captured and stored those minute amounts of energy will be sufficient to support micro-power wireless electronics implanted in our bodies. And this is just one example among endless other possibilities efficient energy harvesting will open up.
 
What sparks my interest in energy harvesting in particular is the fact that not much can be done in this emerging technical domain without semiconductors. Whether in the form of devices managing micro-power or micro-electro-mechanical (MEMS) sensors, semiconductors are at the core of any energy harvesting effort.

Posted by Jerzy Ruzyllo at 08:32 PM | Semiconductors | Comments (0) | Link


Sunday, January 1, 2012

#185 Have a great year..

I wish all of you the very best of everything in 2012!

Posted by Jerzy Ruzyllo at 06:01 PM | Semiconductors | Comments (0) | Link


Thursday, December 29, 2011

#184 Transistor lingo, cont.

While they may look somewhat strange when put side-by-side, there was no mocking intended when listing all those acronyms commonly used in current transistor lingo (see previous blog).  They all refer to important concepts in transistor scaling which  is a driving force behind the progress of integrated circuit electronics.
 
Let’s consider "DIBL" for instance. It stands for Drain Induced Barrier Lowering and for practical purposes means draoin voltage induced lowering of the potential barrier for electrons flowing from source to drain causing an increase of the leakage current in the off state. Bad effect, no question about it.  Known and understood for quite some time, DIBL is seriously hurting  transistors with ultra-short channel (gate length).

Or take "NBTI"  as an other example. Standing for Negative Bias Temperature Instability, NBTI is a serious reliability problem in state-of he the art transistor engineering, p-channel in particular.

 

This is to let you know that there is a serious physical meaning behind each acronym quoted in the previous blog.

Experience shows that some acronyms used in semiconductor terminology remain current for a very long time, while some others are forgotten, or become irrelevant as technology moves forward. The same will certainly apply to those lkted in the previous blog.
 

Posted by Jerzy Ruzyllo at 06:42 PM | Semiconductors | Comments (0) | Link


Saturday, December 17, 2011

#183 Transistor lingo

I find it interesting to observe how various specializations within semiconductor science and engineering develop their own terminologies and use them to communicate in the way which is often difficult to follow by the “outsiders”. This trend is particularly evident during the large, multi-session conferences.

 
Let's imagine you attend the conference because of your interest and expertise in MEMS technology, or power devices, and decide to venture into a session which discusses next generation transistors. Just to get a glimpse of what’s going on in this technology driving domain. The chance is you'll feel lost as soon as you walk into the room where SCE in HPLP ETSOI , or UTBSOI transistors is discussed along with FD FinFETs, MUQFETs, and TFETs (all of them in HKMG configuration, by the way), and evaluated in terms of electrostatics, NBTI degradation, and DIBL. And this would be just to get you started....
 
P.S. Go to Semiconductor Glossary if you would like to decipher terms mentioned above.

Posted by Jerzy Ruzyllo at 07:36 PM | Semiconductors | Comments (1) | Link


Wednesday, December 7, 2011

#182 Trends confirming IEDM

Fresh from IEDM, my first thought is that it continues to be a great forum to interact with people speaking the same language (language of semiconductors, that is), to refresh all contacts, and to establish new ones. And that's why people who want to stay "in touch" are drawn to the meetings such as IEDM. With at least six sessions being ran in parallel even the most diligent attendee won't be able to listen to more than some 15% of all the talks given.  So, in terms of technical contents the best source of information is a Technical Digest containing all the papers presented (which, by the way, can be acquired at the fraction of the cost of attendence at the meeting). Still, it is not the same as the most valuable experience come from just being there.

 

As far as technical content is concerned my first impression is that the IEDM 2011 was mostly confirming trends in semiconductor device science and engineering that are already established rather than bringing to the surface entirely new technical solutions. I will be more specific in this regard in the follow up blogs. So, stay tuned...

Posted by Jerzy Ruzyllo at 08:09 PM | Semiconductors | Comments (0) | Link


Saturday, December 3, 2011

#181 IEDM has a long history

 

Speaking of IEDM (see the previous blog), its history goes back to 1955 when the very first Electron Device Meeting was held (term "international" was add to the title later). Due to the long history and a tradition of being a forum for everything what's truly the latest in the area of electron devices, IEDM is an accurate reflection of the progress in semiconductor device science and engineering over the last 50+ years.

Going over IEDM's Technical Digests from earlier years is both interesting and revealing experience as I learned browsing through 1985 and 1987 editions of the Digest which I recently found in my office. Obviously much have changed in 25 years (for instance, gate length is shorter by almost 20x). On the other hand, however, the nature of the problems semiconductor community is dealing with, as well as driving forces and motivation behind everything that we, as semiconductor R&D folks, are doing did not change much. Also, by going over those old issues one gains perspective on how long does it take to develop a concept presented during the conference into a manufacturing product.


P.S. My first IEDM paper goes back to 1977 edition at which time I was very much a professional rookie. I remember a hassle of typing a camera-ready version of my paper on a typewriter. And not even an electric one.... If you will get a chance, go to paper #8.6 in 1977 volume to see the outcome.

Posted by Jerzy Ruzyllo at 09:58 AM | Semiconductors | Comments (1) | Link


Sunday, November 27, 2011

#180 2011 IEDM

The every-other-year East Coast edition of an International Electron Device Meeting (IEDM) is back in Washington, D.C. this year. After 2009 meeting being held in Baltimore, IEDM comes back to its regular location for December 4-7 gathering.

 

And usual in early December, attention of international semiconductor device community will be focused on IEDM. I will be there and will be glad to let you know if anything particularly interesting will catch my eye. In the meantime take a moment to take a look at the Technical Program of IEDM 2011.

Posted by Jerzy Ruzyllo at 08:31 PM | Semiconductors | Comments (0) | Link


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Jerzy Ruzyllo is a Distinguished Professor of Electrical Engineering and Professor of Materials Science and Engineering at Penn State and in his spare time he likes to blog about semiconductors and related topics.


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Recent posts
#189 Global nature of semiconductors
#188 193 nm saga continues
#187 Digging deep into the Periodic Table of Elements
#186 Energy harvesting
#185 Have a great year..
#184 Transistor lingo, cont.
#183 Transistor lingo
#182 Trends confirming IEDM
#181 IEDM has a long history
#180 2011 IEDM


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