Semiconductor Glossary, Developed Semi OneSource.

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With over 2000 terms defined and explained, Semiconductor Glossary is the most complete reference in the field of semiconductors on the market today.


Including some 500 new terms defined and remaining terms updated and modified, a 2nd edition book version of this glossary is now available.

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Term (Index) Definition
SWI  Single-Wafer Processor/Process; as the wafer size in high-end IC manufacturing increases, a trend toward single-wafer processing (as opposed to batch processing) intensifies.
batch process  process in which several wafers are processed at the same time; opposite to single wafer process; e.g. thermal oxidation in the furnace (either horizontal or vertical) is a prime example of the batch process.
single-wafer process  only one wafer is processed at the time; opposite to batch process in which several wafers are processed simultaneously; tools are designed specifically for a single-wafer processing; becomes more common as with the gradual increase of wafer diameter and circuit complexity, each and every wafer must be treated individually.
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Jerzy Ruzyllo is a Distinguished Professor Emeritus in the Department of Electrical Engineering at Penn State University.

This book gives a complete account of semiconductor engineering covering semiconductor properties, semiconductor materials, semiconductor devices and their uses, process technology, fabrication processes, and semiconductor materials and process characterization.

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Created and operated by J. Ruzyllo. Copyright J. Ruzyllo 2001-2016. All rights reserved.

Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.