Semiconductor Glossary, Developed Semi OneSource.

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With over 2000 terms defined and explained, Semiconductor Glossary is the most complete reference in the field of semiconductors on the market today.


Including some 500 new terms defined and remaining terms updated and modified, a 2nd edition book version of this glossary is now available.

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Term (Index) Definition
LPD  Light Point Defect; surface defect revealed on the illuminated surface due to the light scattering.
Term (Index) Definition
Liquid Physical Depostion, LPD  Thin-film deposition methods using liquid precursors, e.g. spin deposition, mist deposition, micro-spray, inkjet printing...
mist deposition  deposition technique in which liquid precursor is delivered to the substrate in the form of a very fine mist (submicron droplets); in semiconductor manufacturing used to deposit very thin photoresist films and dielectrics; very useful in those applications in which spin-on process cannot be used, e.g. depositions on very large and/or heavy substrates.

Reference: Primaxx, Inc.
spin-on deposition, spin coating  process used to coat the wafer with material which is originally in the liquid form; liquid is dispensed onto the wafer surface in predetermined amount and the wafer is rapidly rotated (up to 6000 rpm; during spinning liquid is uniformly distributed on the surface by centrifugal forces; material is then solidified by low temperature (typically <200 oC) bake; in semiconductor processing commonly used to apply photoresist.
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Jerzy Ruzyllo is a Distinguished Professor Emeritus in the Department of Electrical Engineering at Penn State University.

This book gives a complete account of semiconductor engineering covering semiconductor properties, semiconductor materials, semiconductor devices and their uses, process technology, fabrication processes, and semiconductor materials and process characterization.

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Created and operated by J. Ruzyllo. Copyright J. Ruzyllo 2001-2016. All rights reserved.

Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.