Semiconductor Glossary, Developed Semi OneSource.

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With over 2000 terms defined and explained, Semiconductor Glossary is the most complete reference in the field of semiconductors on the market today.


Including some 500 new terms defined and remaining terms updated and modified, a 2nd edition book version of this glossary is now available.

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Term (Index) Definition
ICP MS  Inductively Coupled Plasma Mass Spectroscopy; a method allowing identification of species adsorbed on the surface of the wafer; commonly used to detect organic surface contaminants which are thermally desorbed and then identified by analyzing plasma emission spectrum.
GC - MS, gas chromatography  Gas Chromatography Mass Spectroscopy; in solid-state technology used to study species adsorbed on solid surfaces (desorption + analysis by MS); in semiconductor practice technique used to detect organic contaminants on silicon surface.
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Jerzy Ruzyllo is a Distinguished Professor Emeritus in the Department of Electrical Engineering at Penn State University.

This book gives a complete account of semiconductor engineering covering semiconductor properties, semiconductor materials, semiconductor devices and their uses, process technology, fabrication processes, and semiconductor materials and process characterization.

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Created and operated by J. Ruzyllo. Copyright J. Ruzyllo 2001-2016. All rights reserved.

Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.